Entegris

PRODUCT OVERVIEW

KEY FEATURES

• Continuous Monitoring
• No dilution LPC counting
• Real time process control
• Manual injection function for field testing
• Great statistical count: Accuracy > 300,000 LPC's/min
• High resolution sensors: Up to 512 discrete size channels, up to 32 user defined channels
• Optional sensor ranges: FX Nano 0.15-10 microns, FX 0.7-20 microns, LE 0.5-400 microns
• Modular Fluidics Options: Pump NO dilution, Continuous mixed stream, Loop metered stream, Variable mixed dilution, Loop automatic dilution, Automatic particle dilution.
• Sensor calibrations: FX (Field verification), FX Nano (Field verification), LE (Field calibration/verification)

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